USD1121576SActiveUtility

Purge ring for a substrate processing chamber

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Assignee: APPLIED MAT INCPriority: Jul 14, 2022Filed: Jul 14, 2022Granted: Apr 7, 2026
Est. expiryJul 14, 2042(~16 yrs left)· nominal 20-yr term from priority
Inventors:VASQUEZ GERALDINEXU YIWU DIEN-YEHZHANG AIXIRAVI JALLEPALLYLEI YU
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PatentIndex Score
0
Cited by
66
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a purge ring for a substrate processing chamber, as shown and described.

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