USD275032SExpiredUtility

Plasma cassette etcher

61
Assignee: DRYTEK INCPriority: Jan 6, 1982Filed: Jan 6, 1982Granted: Aug 7, 1984
Est. expiryJan 6, 2002(expired)· nominal 20-yr term from priority
Inventors:Joseph A. MaherArthur W. Zafiropoulo
61
PatentIndex Score
8
Cited by
3
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a plasma cassette etcher, substantially as shown and described.

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