USD333144SExpiredUtility
Chamber for semiconductor fabricating machine
Est. expiryOct 3, 2010(expired)· nominal 20-yr term from priority
Inventors:Hiroyuki Koizumi
52
PatentIndex Score
7
Cited by
22
References
1
Claims
Claims
exact text as granted — not AI-modifiedThe ornamental design for a chamber for semiconductor fabricating machine, as shown and described.
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