USD333144SExpiredUtility

Chamber for semiconductor fabricating machine

Assignee: CANON KKPriority: Oct 3, 1990Filed: Mar 27, 1991Granted: Feb 9, 1993
Est. expiryOct 3, 2010(expired)· nominal 20-yr term from priority
52
PatentIndex Score
7
Cited by
22
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a chamber for semiconductor fabricating machine, as shown and described.

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