USD352910SExpiredUtility

Processing machine for electron beam lithography system

Assignee: HITACHI LTDPriority: Nov 27, 1992Filed: Feb 8, 1993Granted: Nov 29, 1994

Est. expiryNov 27, 2012(expired)· nominal 20-yr term from priority

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exact text as granted — not AI-modified

The ornamental design for a processing machine for electron beam lithography system, as shown.

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