USD361752SExpiredUtility

Wafer boat or rack for holding semiconductor wafers

89
Assignee: Tokyo Electron Kasbushiki KaishaPriority: Sep 17, 1993Filed: Sep 17, 1993Granted: Aug 29, 1995
Est. expirySep 17, 2013(expired)· nominal 20-yr term from priority
Inventors:Kenichi Yamaga
89
PatentIndex Score
37
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for wafer boat or rack for holding semiconductor wafers.

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