USD401250SExpiredUtility

Shield and cover for target of sputter coating apparatus

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Assignee: SEMICONDUCTOR EQUIPMENT TECHPriority: Jan 27, 1998Filed: Jan 27, 1998Granted: Nov 17, 1998
Est. expiryJan 27, 2018(expired)· nominal 20-yr term from priority
Inventors:Andrew TudhopeDavid B. JordanJose Gonzalez
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PatentIndex Score
13
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1
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1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.

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