USD401251SExpiredUtility

Shield and cover for target of sputter coating apparatus

57
Assignee: SEMICONDUCTOR EQUIPMENT TECHPriority: Jan 27, 1998Filed: Jan 27, 1998Granted: Nov 17, 1998
Est. expiryJan 27, 2018(expired)· nominal 20-yr term from priority
Inventors:Andrew TudhopeDavid B. JordanJose Gonzalez
57
PatentIndex Score
10
Cited by
1
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.

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