USD490827SExpiredUtility

Electrostatic chuck

65
Assignee: NGK SPARK PLUG COPriority: Dec 20, 2002Filed: Jun 20, 2003Granted: Jun 1, 2004
Est. expiryDec 20, 2022(expired)· nominal 20-yr term from priority
Inventors:Keisuke Okugawa
65
PatentIndex Score
14
Cited by
11
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a electrostatic chuck, as shown and described.

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