USD561206SExpiredUtility

Electrostatic chuck

38
Assignee: MOMENTIVE PERFORMANCE MAT INCPriority: Nov 25, 2005Filed: Nov 25, 2005Granted: Feb 5, 2008
Est. expiryNov 25, 2025(expired)· nominal 20-yr term from priority
Inventors:Tetsuo Kitabayashi
38
PatentIndex Score
3
Cited by
9
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an electrostatic chuck, as shown and described.

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