USD584179SActiveUtility

Mass flow controller

Assignee: BROOKS INSTR LLCPriority: Feb 14, 2008Filed: Feb 14, 2008Granted: Jan 6, 2009
Est. expiryFeb 14, 2028(~1.6 yrs left)· nominal 20-yr term from priority
G05D 7/0635
57
PatentIndex Score
3
Cited by
4
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a mass flow controller, as shown and described.

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