USD630657SActiveUtility

Shaft portion of an apparatus for holding and heating semiconductor wafers or the like

32
Assignee: NGK INSULATORS LTDPriority: Feb 29, 2008Filed: Aug 27, 2008Granted: Jan 11, 2011
Est. expiryFeb 29, 2028(~1.6 yrs left)· nominal 20-yr term from priority
Inventors:Taichi Nakamura
32
PatentIndex Score
1
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a shaft portion of an apparatus for holding and heating semiconductor wafers or the like, as shown and described.

Join the waitlist — get patent alerts

Track USD630657S — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.