USD658691SActiveUtility

Liner for plasma processing apparatus

67
Assignee: SUZUKI KOUKIPriority: Mar 30, 2011Filed: Aug 30, 2011Granted: May 1, 2012
Est. expiryMar 30, 2031(~4.7 yrs left)· nominal 20-yr term from priority
Inventors:Kouki SuzukiJun YamashitaMasakazu BanAtsushi Ueda
67
PatentIndex Score
15
Cited by
37
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a liner for plasma processing apparatus, as shown and described.

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