USD658692SActiveUtility

Liner for plasma processing apparatus

63
Assignee: SUZUKI KOUKIPriority: Mar 30, 2011Filed: Sep 7, 2011Granted: May 1, 2012
Est. expiryMar 30, 2031(~4.7 yrs left)· nominal 20-yr term from priority
Inventors:Kouki SuzukiDaisuke ToriyaKoichi Yamazaki
63
PatentIndex Score
13
Cited by
37
References
1
Claims

Claims

exact text as granted — not AI-modified
The ornamental design for a liner for plasma processing apparatus, as shown and described.

Cited by (0)

No later patents cite this yet.

References (0)

No backward citations on record.