USD702654SActiveUtility

Plasma power transfer rod for a semiconductor deposition apparatus

Assignee: LEE JEONG HOPriority: May 29, 2012Filed: Jun 13, 2012Granted: Apr 15, 2014
Est. expiryMay 29, 2032(~5.9 yrs left)· nominal 20-yr term from priority
58
PatentIndex Score
10
Cited by
10
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a plasma power transfer rod for a semiconductor deposition apparatus, as shown and described.

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