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EUV pod

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Assignee: LU PAO-YIPriority: May 9, 2012Filed: May 9, 2012Granted: Sep 2, 2014
Est. expiryMay 9, 2032(~5.8 yrs left)· nominal 20-yr term from priority
Inventors:Pao-Yi LuCheng-Ju LeeChen-Wei Ku
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PatentIndex Score
7
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an EUV pod, as shown and described.

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