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Chemical vapor deposition fixture

42
Assignee: SILCOTEK CORPPriority: Nov 19, 2012Filed: Nov 19, 2012Granted: Sep 9, 2014
Est. expiryNov 19, 2032(~6.4 yrs left)· nominal 20-yr term from priority
42
PatentIndex Score
7
Cited by
13
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       What is claimed is the chemical vapor deposition fixture, as shown and described.

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