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Substrate supporter for semiconductor deposition apparatus

98
Assignee: ASM IP HOLDING BVPriority: Sep 13, 2013Filed: Mar 12, 2014Granted: Nov 4, 2014
Est. expirySep 13, 2033(~7.2 yrs left)· nominal 20-yr term from priority
Inventors:Hyun Soo JangDae Youn KimJeong Ho LeeSeung Seob LeeHak Yong Kwon
98
PatentIndex Score
598
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate supporter for semiconductor deposition apparatus, as shown and described.

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