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Inner tube for process tube for manufacturing semiconductor wafers

55
Assignee: KANEKO HIROFUMIPriority: Nov 18, 2011Filed: May 10, 2012Granted: Mar 17, 2015
Est. expiryNov 18, 2031(~5.4 yrs left)· nominal 20-yr term from priority
Inventors:Hirofumi KanekoAtsushi Endo
55
PatentIndex Score
9
Cited by
27
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described.

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