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Top cover of a load lock chamber
Est. expiryMar 28, 2033(~6.7 yrs left)· nominal 20-yr term from priority
Inventors:Junichi Hirakida
90
PatentIndex Score
513
Cited by
37
References
1
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exact text as granted — not AI-modifiedCLAIM
The ornamental design for a top cover for a load lock chamber, as shown and described.Cited by (0)
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