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Boat for substrate processing apparatus

79
Assignee: HITACHI INT ELECTRIC INCPriority: Mar 22, 2013Filed: Sep 20, 2013Granted: Oct 13, 2015
Est. expiryMar 22, 2033(~6.7 yrs left)· nominal 20-yr term from priority
Inventors:Kosuke TakagiKiyohiko MaedaYuji UranoNaoki MatsumotoYasuaki Komae
79
PatentIndex Score
23
Cited by
40
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a boat for substrate processing apparatus, as shown and described.

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