USD767234SActiveUtility

Wafer support ring

Assignee: ENTEGRIS INCPriority: Mar 2, 2015Filed: Mar 2, 2015Granted: Sep 20, 2016
Est. expiryMar 2, 2035(~8.6 yrs left)· nominal 20-yr term from priority
93
PatentIndex Score
66
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a wafer support ring, as shown and described.

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