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Gas supply plate for semiconductor manufacturing apparatus

97
Assignee: ASM IP HOLDING BVPriority: Nov 18, 2015Filed: Feb 19, 2016Granted: May 23, 2017
Est. expiryNov 18, 2035(~9.4 yrs left)· nominal 20-yr term from priority
Inventors:Dae Youn KimHie Chul KimHyun Soo Jang
97
PatentIndex Score
504
Cited by
22
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas supply plate for a semiconductor manufacturing apparatus, as shown and described.

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