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Gas dispersing plate for semiconductor manufacturing apparatus

98
Assignee: ASM IP HOLDING BVPriority: Jan 8, 2016Filed: Mar 22, 2016Granted: Jun 20, 2017
Est. expiryJan 8, 2036(~9.5 yrs left)· nominal 20-yr term from priority
Inventors:Hyun Soo JangJeong Ho LeeYoung-Hoon KimYoung Hyo Jeon
98
PatentIndex Score
406
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas dispersing plate for a semiconductor manufacturing apparatus, as shown and described.

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