USD794753SActiveUtility
Showerhead for a semiconductor processing chamber
Est. expiryApr 8, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:Aaron Miller
96
PatentIndex Score
303
Cited by
22
References
1
Claims
Claims
exact text as granted — not AI-modifiedCLAIM
The ornamental design for a showerhead for a semiconductor processing chamber, as shown and described.Join the waitlist — get patent alerts
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