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Target profile for a physical vapor deposition chamber target

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Assignee: APPLIED MATERIALS INCPriority: Jun 18, 2015Filed: Jun 18, 2015Granted: Sep 26, 2017
Est. expiryJun 18, 2035(~8.9 yrs left)· nominal 20-yr term from priority
Inventors:Ryan Edwin HansonZhenbin GeVivek Gupta
99
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CLAIM 
     
       The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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