USD825505SActiveUtility

Target profile for a physical vapor deposition chamber target

Assignee: APPLIED MATERIALS INCPriority: Jun 18, 2015Filed: Sep 22, 2017Granted: Aug 14, 2018
Est. expiryJun 18, 2035(~8.9 yrs left)· nominal 20-yr term from priority
99
PatentIndex Score
318
Cited by
14
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.

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