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Susceptor for semiconductor substrate processing apparatus

97
Assignee: ASM IP HOLDING BVPriority: Apr 7, 2017Filed: May 16, 2017Granted: Oct 16, 2018
Est. expiryApr 7, 2037(~10.7 yrs left)· nominal 20-yr term from priority
Inventors:Sang Jin JeongJeung Hoon HanYoung Seok ChoiJu Hyuk Park
97
PatentIndex Score
530
Cited by
2,081
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a susceptor for semiconductor substrate processing apparatus, as shown and described.

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