USD837754SActiveUtility

Plasma chamber liner

54
Assignee: APPLIED MATERIALS INCPriority: Apr 28, 2017Filed: Apr 28, 2017Granted: Jan 8, 2019
Est. expiryApr 28, 2037(~10.8 yrs left)· nominal 20-yr term from priority
Inventors:Eric Kihara Shono
54
PatentIndex Score
6
Cited by
19
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a plasma chamber liner, as shown and described.

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