USD846513SActiveUtility

Sheet heater for electrostatic chuck

36
Assignee: NGK INSULATORS LTDPriority: Apr 27, 2016Filed: Oct 21, 2016Granted: Apr 23, 2019
Est. expiryApr 27, 2036(~9.8 yrs left)· nominal 20-yr term from priority
Inventors:Hiroshi TakebayashiRishun Kin
36
PatentIndex Score
2
Cited by
29
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a sheet heater for electrostatic chuck, as shown and described.

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