USD871466SActiveUtility

Rotary tool for boat of semiconductor manufacturing apparatus

Assignee: HITACHI INT ELECTRIC INCPriority: Jul 25, 2017Filed: Jan 17, 2018Granted: Dec 31, 2019

Est. expiryJul 25, 2037(~11 yrs left)· nominal 20-yr term from priority

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown and described.

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