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Gas supply plate for semiconductor manufacturing apparatus

98
Assignee: ASM IP HOLDING BVPriority: Feb 1, 2018Filed: May 3, 2018Granted: Apr 7, 2020
Est. expiryFeb 1, 2038(~11.5 yrs left)· nominal 20-yr term from priority
Inventors:Hak Joo LeeJeong Jun WooJong-Hyun AhnYoon Ki Min
98
PatentIndex Score
369
Cited by
4,083
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a gas supply plate for semiconductor manufacturing apparatus, as shown and described.

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