USD884757SActiveUtility

Rotary tool for boat of semiconductor manufacturing apparatus

67
Assignee: HITACHI INT ELECTRIC INCPriority: Jul 25, 2017Filed: Jan 17, 2018Granted: May 19, 2020
Est. expiryJul 25, 2037(~11 yrs left)· nominal 20-yr term from priority
Inventors:Satoshi Fujii
67
PatentIndex Score
10
Cited by
12
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown and described.

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