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Composite seal member for semiconductor production apparatus

81
Assignee: VALQUA LTDPriority: Feb 8, 2018Filed: Aug 3, 2018Granted: Sep 1, 2020
Est. expiryFeb 8, 2038(~11.6 yrs left)· nominal 20-yr term from priority
Inventors:Michi KurodaSangho Kim
81
PatentIndex Score
21
Cited by
30
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a composite seal member for semiconductor production apparatus, as shown and described.

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