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Composite seal member for semiconductor production apparatus

98
Assignee: VALQUA LTDPriority: Dec 1, 2017Filed: May 14, 2018Granted: Oct 6, 2020
Est. expiryDec 1, 2037(~11.4 yrs left)· nominal 20-yr term from priority
Inventors:Nobuhiro YoshidaIppei NakagawaSangho Kim
F16J 15/025
98
PatentIndex Score
12
Cited by
48
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for composite seal member for semiconductor production apparatus, as shown and described.

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