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Seal member for semiconductor production apparatus

89
Assignee: VALQUA LTDPriority: Jul 24, 2018Filed: Jul 21, 2020Granted: May 18, 2021
Est. expiryJul 24, 2038(~12 yrs left)· nominal 20-yr term from priority
Inventors:Kazuaki TsujiTakafumi Sakurai
F16K 51/02
89
PatentIndex Score
2
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45
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a seal member for semiconductor production apparatus, as shown and described.

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