USD934315SActiveUtility

Deposition ring for a substrate processing chamber

97
Assignee: APPLIED MATERIALS INCPriority: Mar 20, 2020Filed: Mar 20, 2020Granted: Oct 26, 2021
Est. expiryMar 20, 2040(~13.7 yrs left)· nominal 20-yr term from priority
Inventors:Ilya LavitskyKeith A. MillerGoichi Yoshidome
97
PatentIndex Score
35
Cited by
46
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a deposition ring for a substrate processing chamber, as shown and described.

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