USD943539SActiveUtility
Confinement plate for a substrate processing chamber
Est. expiryMar 19, 2040(~13.7 yrs left)· nominal 20-yr term from priority
Inventors:Joseph Perry
79
PatentIndex Score
7
Cited by
75
References
1
Claims
Claims
exact text as granted — not AI-modifiedCLAIM
The ornamental design for a confinement plate for a substrate processing chamber, as shown and described.Join the waitlist — get patent alerts
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