USD979524SActiveUtility

Confinement liner for a substrate processing chamber

90
Assignee: APPLIED MATERIALS INCPriority: Mar 19, 2020Filed: Mar 19, 2020Granted: Feb 28, 2023
Est. expiryMar 19, 2040(~13.7 yrs left)· nominal 20-yr term from priority
Inventors:Joseph Perry
90
PatentIndex Score
16
Cited by
65
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a confinement liner for a substrate processing chamber, as shown and described.

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