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Substrate processing system carrier

61
Assignee: APPLIED MATERIALS INCPriority: Jun 2, 2020Filed: Jun 2, 2020Granted: Mar 7, 2023
Est. expiryJun 2, 2040(~13.9 yrs left)· nominal 20-yr term from priority
Inventors:Aaron GreenNicholas Michael Bergantz
61
PatentIndex Score
3
Cited by
72
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1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate processing system carrier, as substantially shown and described.

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