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Reactor wall for substrate processing apparatus

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Assignee: ASM IP HOLDING BVPriority: May 11, 2021Filed: May 11, 2021Granted: Mar 28, 2023
Est. expiryMay 11, 2041(~14.8 yrs left)· nominal 20-yr term from priority
Inventors:Jaehyun KimJeongho LeeJinho ShinJongsu Kim
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PatentIndex Score
1
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8,390
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Claims

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CLAIM 
     
       The ornamental design for a reactor wall for substrate processing apparatus, as shown and described.

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