USD986190SActiveUtility

Confinement plate for a substrate processing chamber

54
Assignee: APPLIED MATERIALS INCPriority: Mar 19, 2020Filed: Jan 24, 2022Granted: May 16, 2023
Est. expiryMar 19, 2040(~13.7 yrs left)· nominal 20-yr term from priority
Inventors:Joseph Perry
54
PatentIndex Score
1
Cited by
80
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a confinement plate for a substrate processing chamber, as shown and described.

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