Titanium hermetic seals

Abstract

Titanium is prenitrided by being heated in a nitrogen environment under conditions which give rise to the formation of a titanium-nitride surface layer on the titanium. Titanium thus prenitrided may be used in electrical components which are hermetically sealed using silicate glasses and standard glass sealing techniques. According to the method of the invention, alkali volatilization and formation of deleterious interfacial silicide are inhibited.

We claim: 
     
       1. A method for enhancing seals between silicate glass and titanium including the step of passivating titanium surfaces using nitrogen prior to sealing. 
     
     
       2. The method of claim 1 wherein said passivation step includes heating said titanium in the presence of nitrogen. 
     
     
       3. The method of claim 2 wherein said heating takes place at 1000° C. 
     
     
       4. The method of claim 2 wherein said heating occurs for between 2 and 60 minutes. 
     
     
       5. The method of claim 3 wherein said heating occurs for between 2 and 60 minutes. 
     
     
       6. The method of claim 2 wherein said heating occurs in a furnace that is evacuated and then back-filled with gettered nitrogen. 
     
     
       7. The method of claim 3 wherein said heating occurs in a furnace that is evacuated and then back-filled with gettered nitrogen. 
     
     
       8. The method of claim 4 wherein said heating occurs in a furnace that is evacuated and then back-filled with gettered nitrogen. 
     
     
       9. The method of claim 5 wherein said heating occurs in a furnace that is evacuated and then back-filled with gettered nitrogen. 
     
     
       10. The method of claim 6 wherein said furnace contains graphite fixtures. 
     
     
       11. The method of claim 7 wherein said furnace contains graphite fixtures. 
     
     
       12. The method of claim 8 wherein said furnace contains graphite fixtures. 
     
     
       13. The method of claim 9 wherein said furnace contains graphite fixtures.