Cutting metallates of refractory metals

Abstract

Lithium niobate and tantalate crystal rods or boules are sawed to wafers with diamond edged saws in the presence of inert fluorinated lubricating liquids.

What is claimed is:  
     
       1. Method of working refractory metal metallates comprising applying a cutting tool to a workpiece form of the metallate in the presence of one or more of the fluorinated lubricants selected from the group consisting of 
       PFCs,  
       PFAs,  
       HFAs,  
       PFMs,  
       and  
       Polymerization products of any of the foregoing.  
     
     
       2. Method as defined in  claim 1  wherein the working method is sawing with a diamond edged wheel. 
     
     
       3. Method as defined in  claim 1  wherein the working method is cutting. 
     
     
       4. Method as defined in  claim 1  wherein the working method is grinding or polishing. 
     
     
       5. Method as defined in any of claims  2 - 4  and  1  wherein the metallate is in a single crystal elongated form. 
     
     
       6. Method as defined in any of claims  2 - 4  and  1  wherein the metallate is selected from the group consisting of niobates, tantalates, titanates, molybdates,tungstates, zirconates, hafnates, vanadates. 
     
     
       7. Method as defined in  claim 6  wherein the metallate is lithium niobate. 
     
     
       8. Method in accordance with any of claims  1 - 4  wherein the lubricant is selected from the class consisting of perfluoroalkanes, perfluorocycloalkanes, perfluoroamines, and perfluoromorpholines, and the polymerization products of these materials and substituted products of any of them.