Modular SMIF pod breather, adsorbent, and purge cartridges

Abstract

Modular cartridges which may be inserted into and removed from a well or receptacle on the bottom of a pod. The cartridges may be configured to include various types and combinations of valves, filters, and/or conditioning agents. A standalone cartridge replacement station may be provided for inserting and removing various cartridges from one or more of the receptacles on the bottom of a pod while wafers are seated within the pod. The standalone replacement unit may decouple an existing cartridge from the pod by rotating the cartridge from a locked to an unlocked position and then lowering the cartridge out of the pod. Thereafter, the replacement station may insert a new cartridge up into the appropriate receptacle and rotate the cartridge into a locked position in the pod.

1. A SMIF pod, comprising:
 a pod, having a pod shell and a pod door, said pod door forming a gas-tight seal with said pod shell, said pod having an opening;  
 a receptacle forming a gas-tight seal with said pod, and positioned to cover said opening in said pod; and  
 an interchangeable modular cartridge positioned within said receptacle.  
 
     
     
       2. A system for allowing gas to flow through an opening in a pod as recited in  claim 1 , wherein said interchangeable modular cartridge has at least one component selected from the group consisting of (i) a valve, (ii) a filter, (iii) a conditioning agent, and (iv) a blank. 
     
     
       3. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a breather filter. 
     
     
       4. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises an adsorbent filter. 
     
     
       5. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a valve. 
     
     
       6. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a conditioning agent. 
     
     
       7. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a blank. 
     
     
       8. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a filter and a valve. 
     
     
       9. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a filter and a conditioning agent. 
     
     
       10. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a valve and a conditioning agent. 
     
     
       11. A system for allowing gas to flow through an opening in a pod as recited in  claim 2 , wherein said component comprises a filter, a valve and a conditioning agent. 
     
     
       12. A system for allowing gas to flow through an opening in a pod as recited in  claim 1 , further comprising a station for inserting and/or removing said cartridge from the opening. 
     
     
       13. A cartridge allowing gas to flow through an opening in a SMIF pod, comprising:
 an interchangeable modular cartridge forming a gas-tight seal with the pod, and positioned to cover the opening of the SMIF pod; and  
 at least one component positioned in said modular cartridge, the component selected from a group consisting of (i) a valve, (ii) a filter, (iii) a conditioning agent, and (iv) a blank.  
 
     
     
       14. A pod as recited in  claim 13 , said cartridge including a pair of wings for locking said cartridge in the pod. 
     
     
       15. A pod as recited in  claim 13 , wherein the opening comprises an inlet through which the gas enters the pod. 
     
     
       16. A pod as recited in  claim 13 , wherein the opening comprises an outlet through which the gas exits the pod. 
     
     
       17. A cartridge allowing gas to flow through an opening in a SMIF pod, comprising:
 an interchangeable modular cartridge positioned over the opening of the SMIF pod, the modular cartridge having a pair of wings for locking said cartridge to the pod; and  
 at least one component positioned in said modular cartridge, the component selected from a group of a valve, a filter, a conditioning agent and a blank.  
 
     
     
       18. A system comprising:
   a wafer enclosure for receiving a plurality of wafers, the wafer enclosure comprising an enclosure portion with an opening and a door to sealingly close the opening, wherein the enclosure has a receptacle;        a set of cartridges configured to sealingly engage the wafer enclosure through the receptacle, wherein the set of cartridges comprise at least two different cartridges selected from the group consisting of a valve, a filter, a conditioning agent and a blank.     
     
     
       19. The system of  claim 18 , wherein each of the cartridges have an annular shape. 
     
     
       20. The system of  claim 19 , wherein each of the cartridges has a pair of wings extending from an outer surface thereof. 
     
     
       21. The system of  claim 19 , wherein each of the cartridges has at least one slot formed in an inner surface thereof. 
     
     
       22. The system of  claim 18 , and further comprising an interface seal that provides a substantially gas- tight seal between the receptacle and one of the cartridges that is attached to the wafer enclosure.   
     
     
       23. The system of  claim 18 , wherein each of the cartridges may be removably attached to the receptacle without removing wafers from the wafer enclosure. 
     
     
       24. The system of  claim 18 , wherein the receptacle is positioned on a bottom portion of the wafer enclosure. 
     
     
       25. The system of  claim 24 , wherein the receptacle is at least partially recessed in the bottom portion. 
     
     
       26. The system of  claim 18 , wherein the wafer enclosure is a SMIF pod. 
     
     
       27. A method of selectively adapting a wafer enclosure to a desired purging capability, the wafer enclosure having an enclosure portion with an opening and a door to sealingly close the opening, wherein the enclosure has a receptacle, the method comprising:
   providing a workstation having a work space and a set of cartridges that includes at least two different cartridges selected from the group consisting of a valve, a filter, a conditioning agent and a blank        selecting one of the cartridges from the set of cartridges that correlates to the desired purging capability;        positioning the cartridge in the work space;        moving the cartridge into the receptacle; and        attaching the cartridge to the wafer enclosure through the receptacle.     
     
     
       28. The method of  claim 27 , wherein one of the cartridges is moved into the receptacle with an elevator. 
     
     
       29. The method of  claim 27 , and further comprising engaging the cartridge with a pair of keys that extend from the elevator. 
     
     
       30. The method of  claim 27 , wherein each of the cartridges include a pair of wings extending from an outer surface thereof, wherein the receptacle includes a pair of slots formed therein that are adapted to receive the pair of wings, and wherein the cartridge is attached to the receptacle by extending the pair of wings through the pair of slots and rotating the cartridge with respect to the receptacle.