Diazodisulfones

Abstract

wherein R 1 is a C 3-8 branched or cyclic alkyl group, and R 2 is a C 1-8 straight-chain, branched or cyclic alkyl group, is effective as a photoacid generator when used in a photoresist material for light of 300 nm or less.

1. A diazodisulfone compound of the formula: 
                   
       wherein R 1  is a branched or cyclic alkyl group having 3 to 8 carbon atoms; and R 2  is a straight-chain, branched or cyclic alkyl group having 1 to 8 carbon atoms. 
     
     
       2. A diazodisulfone compound according to  claim 1 , wherein R 1  is a cyclopentyl group, a cyclohexyl group, an isopropyl group, a sec-butyl group, a tert-butyl group or an isoamyl group; and R 2  is a methyl group, an ethyl group, a cyclopentyl group, a cyclohexyl group, an isopropyl group, a sec-butyl group, a tert-butyl group or an isoamyl group. 
     
     
       3. A diazodisulfone compound according to  claim 1 , which is 
       bis(cyclohexylsulfonyl)diazomethane,  
       cyclohexylsulfonylethylsulfonyldiazomethane,  
       bis(isopropylsulfonyl)diazomethane,  
       bis(tert-butylsulfonyl)diazomethane,  
       bis(sec-butylsulfonyl)diazomethane,  
       tert-butylsulfonylmethylsulfonyldiazomethane,  
       tert-butylsulfonylcyclohexylsulfonyldiazomethane,  
       bis(cyclopentylsulfonyl)diazomethane,  
       cyclopentylsulfonyl-tert-butylsulfonyldiazomethane, or  
       bis(isoamylsulfonyl)diazomethane.  
     
     
       4. A diazodisulfone compound of the formula: 
                   
       wherein R 1  is a branched or cyclic alkyl group having 3 to 8 carbon atoms; and R 2  is a branched or cyclic alkyl group having 3 to 8 carbon atoms. 
     
     
       5. A compound according to  claim 4 , wherein R 1  is a branched alkyl group having 3 to 8 carbon atoms; and R 2  is a branched alkyl group having 3 to 8 carbon atoms. 
     
     
       6. A compound according to  claim 4 , wherein R 1  is a cyclic alkyl group having 3 to 8 carbon atoms; and R 2  is a cyclic alkyl group having 3 to 8 carbon atoms. 
     
     
       7. A compound according to  claim 4 ,  diazodisulfone compound of the formula: 
                 
 
       
        
       
       wherein R 1  is a branched alkyl group having 3 to 8 carbon atoms; and R 2  is a cyclic alkyl group having 3 to 8 carbon atoms.