Radiation detection device and method of making the same

Abstract

Light-receiving devices are two-dimensionally arranged on a substrate, bonding pads electrically connected to the light-receiving devices in the respective rows or columns via signal lines are arranged on the outer periphery of the substrate, and a protective passivation film is disposed on the light-receiving devices and signal lines, thereby forming a light-receiving device array. On the light-receiving surface of the light-receiving device array, a scintillator made of columnar crystals of CsI is deposited. On the other hand, a resin frame formed like an elongated frame is disposed inside the bonding pads. Inside this frame, a protective film in which an inorganic film is held between organic films made of Parylene is laminated. The outer periphery of the protective film is in close contact with the resin frame with the aid of the coating resin.

1. A radiation detection device comprising; :
 a light-receiving device array in which a plurality of light-receiving devices are one- or two-dimensionally arranged on a substrate to form a light-receiving portion, and a plurality of bonding pads electrically connected to said light-receiving devices in respective rows or columns of said light-receiving portion and disposed outside said light-receiving portion to form a bonding pad portion;  
 a scintillator layer, deposited on said light receiving devices of said light-receiving portion, for converting a radiation into light detectable light with  by said light-receiving device array;  
 a resin frame, made of a  resin, said resin frame forming a closed frame surrounding said scintillator layer or said bonding pads; and  
 a radiation-transmittable, moisture-resistant protective film covering said scintillator layer, and a surface of said light-receiving-device array surrounding said scintillator layer and said resin frame so as to expose at least said bonding pad portion, wherein an edge portion of said moisture-resistant protective film is bonded to said light-receiving device array with said resin frame.  
 
     
     
       2. A radiation detection device according to  claim 1 , further comprising a coating resin covering said edge portion of said moisture-resistant protective film and said resin frame. 
     
     
       3. A radiation detection device according to  claim 1 , wherein said moisture-resistant protective film constituted by a multilayer film made of at least two layers including an organic film laminated thereon. 
     
     
       4. A radiation detection device according to  claim 1 , wherein said multilayer film further including an inorganic film. 
     
     
       5. A radiation detection device according to  claim 1 , wherein the resin frame is a plurality of resin frames and each resin frame forms a closed frame surrounding said scintillator layer or said bonding pads. 
     
     
       6. A method of making a radiation detection device comprising:
 forming a light-receiving portion, said forming the light-receiving portion comprising:  
 one- or two-dimensionally arranging a plurality of light receiving devices and a plurality of bonding pads being electrically connected to said light-receiving devices in respective rows or columns of said light-receiving portion and disposed outside said light-receiving portion on a substrate, and  
 depositing a scintillator layer for converting a radiation into detectable light with said light-receiving devices thereon;  
 forming a resin frame on said light-receiving device array with a resin, each resin frame forming a closed frame surrounding said scintillator layer or said bonding pads;  
 forming a radiation-transmittable, moisture-resistant protective film enveloping said light-receiving device array as a whole;  
 cutting said moisture-resistant protective film on the top of said resin frame; and  
 removing said moisture-resistant protective film from said bonding pad portion so as to expose said bonding pad portion.  
 
     
     
       7. A method of making a radiation detection device according to  claim 6 , further comprising a step of covering edge portions of said moisture-resistant protective film and said resin frame with a resin. 
     
     
       8. A method of making a radiation detection device according to  claim 6 , wherein said step of forming a moisture-resistant protective film comprising:
 a sub-step forming a radiation-transmittable first organic film such as to envelope said light-receiving device array as a whole; and  
 a sub-step of laminating at least one layer of film on said first organic film so as to form a radiation-transmittable, moisture-resistant protective film constituted by a multilayer film made of at least two layers.  
 
     
     
       9. A method of making a radiation detection device according to  claim 8 , wherein said multilayer film including at least one inorganic film. 
     
     
       10. A method of making a radiation detection device according to  claim 6 , wherein the resin frame is a plurality of resin frames and each resin frame forms a closed frame surrounding said scintillator layer or said bonding pads.