P
USRE41578EExpiredUtilityPatentIndex 74

Micro electrochemical energy storage cells

Assignee: UNIV RAMOTPriority: Oct 22, 1998Filed: Oct 3, 2007Granted: Aug 24, 2010
Est. expiryOct 22, 2018(expired)· nominal 20-yr term from priority
Inventors:NATHAN MENACHEMPELED EMANUELHARONIAN DAN
Y10T29/49108H01M 6/40H01M 2010/0495H01M 6/18H05K 1/16H01M 10/0585H01M 10/052Y02E60/13H05K 2201/10037H01G 11/70H01G 11/56H01G 11/06H01G 11/26Y02P70/50H01G 11/74H01G 11/22Y02E60/10
74
PatentIndex Score
5
Cited by
29
References
36
Claims

Abstract

Thin-film micro-electrochemical energy storage cells (MEESC) such as microbatteries and double-layer capacitors (DLC) are provided. The MEESC comprises two thin layer electrodes, an intermediate thin layer of a solid electrolyte and optionally, a fourth thin current collector layer; said layers being deposited in sequence on a surface of a substrate. The MEESC is characterized in that the substrate is provided with a plurality of through cavities of arbitrary shape, with high aspect ratio. By using the substrate volume, an increase in the total electrode area per volume is accomplished.

Claims

exact text as granted — not AI-modified
1. A thin-film micro-electrochemical energy storage cell (MEESC) in the form of a microbattery, said microbattery comprising:
 a substrate having two surfaces,    a thin layer anode consisting of alkali metal (M), alkali metal alloy or in the charged state consisting of lithiated carbon or graphite,    a thin layer cathode consisting of LiCoO 2 , LiNiO 2 , LiMn 2 O 4 , TiS 2 , V 2 O 5 , V 3 O 8  or lithiated forms of the vanadium oxides,    a solid electrolyte intermediate to said anode and cathode layers, consisting of a tin layer of an ionically conducting or electronically non-conducting material selected from glass, poly(ethylene oxide) based polymer electrolyte or polycrystalline material, and    optionally, a fourth current collector layer;    said anode or cathode layer being deposited in sequence on both surfaces of said substrate, said microbattery being characterized in that the substrate is provided with a plurality of through cavities of arbitrary shape, with an aspect ratio greater than 1, the diameter of said cavities being from about 15μ to about 150μ; said anode, cathode, solid electrolyte layers and optional current collector layer being also deposited throughout the inner surface of said cavities.    
     
     
       2. The microbattery of  claim 1 , wherein the substrate is made of a single crystal or amorphous material. 
     
     
       3. The microbattery of  claim 2 , wherein the substrate material is selected from the group consisting of glass, alumina, semiconductor materials for use in microelectronics and ceramic materials. 
     
     
       4. The microbattery of  claim 3 , wherein the substrate material is made of silicon. 
     
     
       5. The microbattery of  claim 1 , wherein the alkali metal (M) which forms the anode is lithium. 
     
     
       6. A lithium ion type microbattery according to  claim 1 , being fabricated in the discharge state where the cathode is fully lithiated and the alloy, carbon or graphite anode is not charged with lithium. 
     
     
       7. The microbattery of  claim 1 , wherein the through cavities of the substrate are formed by Inductive Coupled Plasma etching. 
     
     
       8. The microbattery of  claim 1 , wherein the through cavities of the substrate have an aspect ratio of between about 2 to about 50. 
     
     
       9. The microbattery of  claim 1 , wherein said cavities have a cylindrical geometry. 
     
     
       10. The microbattery of  claim 1 , wherein the solid electrolyte is a polymer electrolyte based on poly(ethylene oxide) and CF 3 SO 3 Li, (CF 3 SO 2 ) 2 NLi, or mixtures thereof. 
     
     
       11. The microbattery of  claim 1 , wherein the solid electrolyte is selected from Li X PO Y N Z  where 2<x<3, 2y=3z and 0.18<z<0.43, or LiS-SiS 2  glasses doped with up to 5% LiSO 4  or 30% LiI. 
     
     
       12. The microbattery of  claim 1 , wherein the solid electrolyte is a polymer electrolyte and it comprises between about 2 to about 15% (V/V) high surface area of inorganic, nanosize particles of ceramic powder which consists of Al 2 O 3 , SiO 2 , MgO, TiO 2  or mixtures thereof. 
     
     
       13. The microbattery of  claim 1 , wherein the solid electrolyte comprises Li 2 CO 3  doped with up to about 10% (% atomic weight relative to Li) of Ca, Mg, Ba, Sr, Al or B. 
     
     
       14. A self-powered semiconductor component comprising a microbattery according to  claim 2 . 
     
     
       15. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery, said microbattery comprising:      a substrate having two surfaces and including a plurality of through cavities of arbitrary shape, said cavities characterized by having an aspect ratio greater than  1  and extending between said two surfaces;        a thin layer anode;        a thin layer cathode; and        an electrolyte intermediate to said anode and cathode layers;        wherein said anode layer, said cathode layer, and said electrolyte intermediate to said anode and cathode layers, are deposited over said two surfaces and throughout the inner surface of said cavities.     
     
     
       16. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said substrate comprises a single crystal substrate.   
     
     
       17. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 16    and wherein said single crystal substrate comprises a silicon substrate.   
     
     
       18. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said substrate comprises a single amorphous material.   
     
     
       19. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said substrate comprises at least one material selected from the group consisting of glass, alumina, semiconductors and ceramic materials.   
     
     
       20. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said anode comprises at least one material selected from the group consisting of an alkali metal, an alkali metal alloy, carbon and graphite.   
     
     
       21. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 20    and wherein said alkali metal comprises lithium.   
     
     
       22. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 20    being fabricated in the discharge state wherein said cathode layer is fully lithiated.   
     
     
       23. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 22    and wherein said metal alloy is not charged with lithium.   
     
     
       24. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 22    and wherein said carbon and said graphite are not charged with lithium.   
     
     
       25. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said cavities have an aspect ratio greater than  1  and up to about  50 .   
     
     
       26. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said electrolyte comprises a polymer electrolyte.   
     
     
       27. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to claim 68 and wherein said polymer electrolyte comprises at least one material selected from the group consisting of glass, a polyethylene oxide based polymer, a polycrystalline material, ethylene carbonate  ( EC ) , diethylcarbonate  ( DEC ) , dimethylcarbonate  ( DMC ) , ethyl methyl carbonate  ( EMC ) , butyl carbonate, propylene carbonate, vinyl carbonate, dialkylsulfites, LiPF   6   , LiBF   4   , LiAsF   6   , LiCF   3   , LiN ( CF   3   SO   2 ) 2   , LiI and LiBr.   
     
     
       28. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said electrolyte is selected from Li   x   PO   y   N   z    where  2 <x< 3 ,  2 y= 3 z and  0 . 18 <z< 0 . 43 , or LiS—SiS   2    glasses doped with up to  5   %  LiSO   4    or  30   %  LiI.   
     
     
       29. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein the electrolyte comprises Li   2   CO   3    doped with up to about  10   % , of atomic weight relative to Li, of Al.   
     
     
       30. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said anode layer comprises lithium metal foil.   
     
     
       31. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said cathode layer comprises at least one material selected from the group consisting of LiCoO   2   , LiNiO   2   , LiMn   2   O   4   , TiS   2   , V   2   O   5   , V   3   O   13   , the lithiated form of V   2   O   5    and the lithiated form of V   3   O   13   .   
     
     
       32. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and also comprising at least one PVDF - graphite layer deposited on said cathode layer.   
     
     
       33. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and wherein said anode layer and said cathode layer comprise carbon.   
     
     
       34. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 33    and wherein said electrolyte comprises a polymer electrolyte.   
     
     
       35. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 15    and also comprising a current collector layer.   
     
     
       36. A thin- film micro - electrochemical energy storage cell  ( MEESC )  in the form of a microbattery according to    claim 35    and wherein said current collector layer is deposited over said anode layer, said electrolyte, and said cathode layer.

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