Micro electromechanical system controlled organic LED and pixel arrays and method of using and of manufacturing same

Abstract

Organic light emitting devices are disclosed that use a micro electromechanical system (MEMS) structure to enable a pixel and pixel array wherein each pixel contains a MEMS and an OLED element. A MEMS structure is used for switching the OLED element. These OLED/MEMS pixels can be fabricated on flex circuit, silicon, as well as other inorganic materials. They can be fabricated in a large array for developing a 2-dimensional display application and each pixel can be addressed through conventional matrix scanning addressing scheme. The ability of fabricating these OLED/MEMS pixels on flexible organic substrates as well as other rigid substrates enables wider selection of substrate materials for use with different applications.

1. A light emitting element comprising:
 an organic light emitting device; and  
 a micro electromechanical system coupled to the organic light emitting device such that actuation of the micro electromechanical system activates the organic light emitting device to produce light, wherein the micro electromechanical system comprises an actuating member operative to move from a first position in which the organic light emitting device is not activated to a second position in which the organic light emitting device is activated, and wherein the micro electromechanical system further comprising a first conductive layer disposed on a first side of the actuating member, the first conductive layer operative to force the actuating member toward the organic light emitting device upon application of a voltage between the first conductive layer and an anode of the organic light emitting device.  
 
     
     
       2. A light emitting element comprising:
 an organic light emitting device which comprises an anode, a cathode, and at least one organic light emitting layer; and  
 a micro electromechanical system coupled to the organic light emitting device such that actuation of the micro electromechanical system activates the organic light emitting device to produce light, wherein the micro electromechanical system comprises a flexible actuating member, the flexible actuating member comprising: 
 a first portion which is fixed with respect a contacting surface and spaced from the contacting surface; and  
 a second portion which can be forced to contact the contacting surface, wherein the contacting surface is a surface of the cathode or the anode of the organic light emitting device.  
 
 
     
     
       3. A light emitting element comprising:
 an organic light emitting device which comprises an anode, a cathode, and at least one organic light emitting layer; and  
 a micro electromechanical system coupled to the organic light emitting device such that actuation of the micro electromechanical system activates the organic light emitting device to produce light, wherein the micro electromechanical system comprises a flexible actuating member, the flexible actuating member comprising: 
 a first portion which is fixed with respect a contacting surface and spaced from the contacting surface; and  
 a second portion which can be forced to contact the contacting surface, wherein the first portion and the second portion of the actuating member are partially separated by a space to allow the second portion to move toward the contacting surface with respect to the first portion, and the space comprises a plurality of slits which define a spring structure.  
 
 
     
     
       4. A light emitting element comprising:
 an organic light emitting device which comprises an anode, a cathode, and at least one organic light emitting layer; and  
 a micro electromechanical system coupled to the organic light emitting device such that actuation of the micro electromechanical system activates the organic light emitting device to produce light, wherein the micro electromechanical system comprises: 
 a micro electromechanical system substrate;  
 a contacting member; and  
 an actuating member;  
 
 
       and wherein the organic light emitting device is deposited directly on the micro electromechanical system substrate; 
       and wherein the light emitting element further comprises a connecting member electrically connected between the contacting member of the micro electromechanical system and an electrode of the organic light emitting device. 
     
     
       5. A light emitting element comprising:
 an organic light emitting device which comprises an anode, a cathode, and at least one organic light emitting layer; and  
 a micro electromechanical system coupled to the organic light emitting device such that actuation of the micro electromechanical system activates the organic light emitting device to produce light, wherein the micro electromechanical system comprises: 
 a micro electromechanical system substrate;  
 a contacting member;  
 a spacing member; and  
 an actuating member;  
 
 
       and wherein the organic light emitting device is adhered to the micro electromechanical system substrate; 
       and wherein the light emitting element further comprises a connecting member electrically connected between the contacting member of the micro electromechanical system and an electrode of the organic light emitting device. 
     
     
       6. An electrical element comprising:
   an electrical device; and        a micro electromechanical system coupled to the electrical device, the micro electromechanical system comprising:      an actuating member operative to move between a first position and a second position; and        a first conductive layer disposed on a first side of the actuating member, application of a voltage between the first conductive layer and an anode of the electrical device causing the actuating member to move toward the second position;          wherein the electrical device is not activated in one of the first and second positions, and the electrical device is activated in the other of the first and second positions.     
     
     
       7. The electrical element of  claim 6 , wherein the electrical device is an optical device. 
     
     
       8. The electrical element of  claim 6 , wherein the electrical device is a light emitting device. 
     
     
       9. An electro- optic element comprising:      an electro - optic device having an electrode and an optical layer; and        a micro electromechanical system coupled to the electro - optic device, the micro electromechanical system comprising:      a flexible actuating member comprising:      a first portion that is fixed with respect to a contacting surface of the electrode and is spaced from the contacting surface; and        a second portion that can be forced to contact the contacting surface;            wherein the first portion and the second portion of the actuating member are partially separated by a space to allow the second portion to move toward the contacting surface with respect to the first portion and the space comprises a plurality of slits that define a spring structure.     
     
     
       10. The electro- optic element of    claim 9   , wherein the electro - optic device is a light emitting device.   
     
     
       11. An electro- optic element comprising:      an electro - optic device having an electrode and an optical layer; and        a micro electromechanical system coupled to the electro - optic device, the micro electromechanical system comprising:      a micro electromechanical system substrate;        a contacting member; and        an actuating member;          wherein the electro - optic device is deposited directly on the micro electromechanical system substrate; and        wherein the electro - optic device further comprises a connecting member electrically connected between the contacting member of the micro electromechanical system and an electrode of the electro - optic device.     
     
     
       12. The electro- optic element of    claim 11   , further comprising:      a spacing member.     
     
     
       13. The electro- optic element of    claim 11   , wherein the electro - optic device is a light emitting device.   
     
     
       14. A micro electromechanical system that activates an electronic device, comprising:
   an actuating member operative to move between a first position and a second position; and        a first conductive layer disposed on a first side of the actuating member, application of a voltage between the first conductive layer and an electrode of the electronic device causing the actuating member to move toward the second position;        wherein the electrical device is not activated in one of the first and second positions, and the electrical device is activated in the other of the first and second positions.     
     
     
       15. The micro electromechanical system of  claim 14 , wherein the electronic device is an optical device. 
     
     
       16. The micro electromechanical system of  claim 14 , wherein the electronic device is a light emitting device. 
     
     
       17. The micro electromechanical system of  claim 16 , wherein the light emitting device is an organic light emitting device. 
     
     
       18. A micro electromechanical system that activates an electronic device, comprising:
   a micro electromechanical system substrate;        a contacting member; and        an actuating member;        wherein the electronic device is deposited directly on the micro electromechanical system substrate; and        wherein the electronic device further comprises a connecting member electrically connected between the contacting member of the micro electromechanical system and an electrode of the electronic device.     
     
     
       19. The micro electromechanical system of  claim 18 , further comprising:
   a spacing member.     
     
     
       20. The micro electromechanical system of  claim 18 , wherein the electronic device is an optical device. 
     
     
       21. The micro electromechanical system of  claim 20 , wherein the electronic device is a light emitting device. 
     
     
       22. The micro electromechanical system of  claim 21 , wherein the light emitting device is an organic light emitting device. 
     
     
       23. An array of electrical elements, comprising:
   a plurality of cells, each cell comprising:      an electrical device; and        a micro electromechanical system coupled to the electrical device, the micro electromechanical system comprising:      an actuating member operative to move between a first position and a second position; and        a first conductive layer disposed on a first side of the actuating member, application of a voltage between the first conductive layer and a anode of the electrical device causing the actuating member to move toward the second position;            wherein the electrical device is not activated in one of the first and second positions, and the electrical device is activated in the other of the first and second positions.     
     
     
       24. The array of electrical elements of  claim 23 , wherein the plurality of cells are arranged in a two- dimensional matrix.   
     
     
       25. The array of electrical elements of  claim 23 , wherein the electrical device is an optical device. 
     
     
       26. The array of electrical elements of  claim 23 , wherein the electrical device is a light emitting device. 
     
     
       27. The array of electrical elements of  claim 26 , wherein the light emitting device is an organic light emitting device. 
     
     
       28. An array of electro- optic elements, comprising:      a plurality of cells, each cell comprising:      an electro - optic device having an electrode and an optical layer; and        a micro electromechanical system coupled to the electro - optic device, the micro electromechanical system comprising:      a flexible actuating member comprising:      a first portion that is fixed with respect to a contacting surface and spaced from the contacting surface; and        a second portion that can be forced to contact the contacting surface;              wherein the first portion and the second portion of the actuating member are partially separated by a space to allow the second portion to move toward the contacting surface with respect to the first portion, and the space comprises a plurality of slits which define a spring structure.     
     
     
       29. The array of electro- optic elements of    claim 28   , wherein the plurality of cells are arranged in a two - dimensional matrix.   
     
     
       30. The array of electro- optic elements of    claim 28   , wherein the electro - optic device is a light emitting device.   
     
     
       31. The array of electrical elements of  claim 30 , wherein the light emitting device is an organic light emitting device. 
     
     
       32. An array of electro- optic elements, comprising:      a plurality of cells, each cell comprising:      an electro - optic device having an electrode and an optical layer; and        a micro electromechanical system coupled to the electro - optic, the micro electromechanical system comprising:      a micro electromechanical system substrate;        a contacting member; and        an actuating member;            wherein the electro - optic device is deposited directly on the micro electromechanical system substrate; and        wherein the electro - optic device further comprises a connecting member electrically connected between the contacting member of the micro electromechanical system and an electrode of the electro - optic device.     
     
     
       33. The array of electro- optic elements of    claim 32   , further comprising:      a spacing member.     
     
     
       34. The array of electro- optic elements of    claim 32   , wherein the plurality of cells are arranged in a two - dimensional matrix.   
     
     
       35. The array of electro- optic elements of    claim 32   , wherein the electro - optic device is a light emitting device.   
     
     
       36. The array of electrical elements of  claim 35 , wherein the light emitting device is an organic light emitting device.