Piezoelectric thin-film resonator and filter using the same

Abstract

A piezoelectric thin-film resonator includes a substrate, a lower electrode arranged on the substrate, a piezoelectric film arranged on the lower electrode, and an upper electrode arranged on the piezoelectric film. A region in which the upper electrode overlaps with the lower electrode through the piezoelectric film has an elliptical shape, and a condition such that 1<a/b<1.9 is satisfied where a is a main axis of the elliptical shape, and b is a sub axis thereof.

1. A piezoelectric thin-film resonator comprising:
 a substrate;  
 a lower electrode arranged on the substrate;  
 a piezoelectric film arranged on the lower electrode; and  
 an upper electrode arranged on the piezoelectric film, a cavity being provided in the substrate and being located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film,  
 the region and a cross-section of the cavity having an elliptical shape, 1<a/b<1.9 is satisfied, where a is a main axis of the elliptical shape, and b is a sub axis thereof.  
 
     
     
       2. The piezoelectric thin-film resonator as claimed in  claim 1 , wherein the cavity and the lower electrode has a relationship of size that satisfies 0.9<b′/b<1.5 where b′ is a sub axis of the cavity. 
     
     
       3. The piezoelectric thin-film resonator as claimed in  claim 1 , wherein one of the main axis and the sub axis is substantially parallel to a current direction. 
     
     
       4. The piezoelectric thin-film resonator as claimed in  claim 1 , wherein the upper electrode and the lower electrode are substantially symmetric about an axis of the elliptical shape perpendicular to a current direction within a range equal to half the length of the sub axis in the current direction. 
     
     
       5. A piezoelectric thin-film resonator comprising:
 a substrate;  
 a lower electrode arranged on the substrate;  
 a piezoelectric film arranged on the lower electrode; and  
 an upper electrode arranged on the piezoelectric film, a cavity provided in the substrate and located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film,  
 a membrane that includes the upper electrode and the lower electrode being formed above the cavity and being curved outwards,  
 the membrane having a maximum height that is measured from a surface of the substrate and is at least 1.5 times the thickness of the membrane.  
 
     
     
       6. A filter comprising a plurality of piezoelectric thin-film resonators, at least one of the thin-film resonators comprising:
 a substrate;  
 a lower electrode arranged on the substrate;  
 a piezoelectric film arranged on the lower electrode; and  
 an upper electrode arranged on the piezoelectric film, a cavity being provided in the substrate and being located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film,  
 the region and a cross-section of the cavity having an elliptical shape, 1<a/b<1.9 being satisfied where a is a main axis of the elliptical shape and b is a sub axis thereof.  
 
     
     
       7. A filter comprising a plurality of piezoelectric thin-film resonators, at least one of the thin-film resonators comprising:
 a substrate;  
 a lower electrode arranged on the substrate;  
 a piezoelectric film arranged on the lower electrode; and  
 an upper electrode arranged on the piezoelectric film, a cavity provided in the substrate and located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film,  
 a membrane that includes the upper electrode and the lower electrode being formed above the cavity and is curved outwards,  
 the membrane having a maximum height that is measured from a surface of the substrate and is at least 1.5 times the thickness of the membrane.  
 
     
     
       8. A piezoelectric thin- film resonator comprising: a substrate; a lower electrode arranged on the substrate; a piezoelectric film arranged on the lower electrode; and an upper electrode arranged on the piezoelectric film, a cavity being located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film, the region and a cross - section of the cavity having an elliptical shape,  1 <a/b< 1 . 9  is satisfied, where a is a main axis of the elliptical shape, and b is a sub axis thereof.   
     
     
       9. The piezoelectric thin- film resonator as claimed in    claim 8   , wherein the cavity and the lower electrode has a relationship of size that satisfies  0 . 9 <b′/b< 1 . 5  where b′ is a sub axis of the cavity.   
     
     
       10. The piezoelectric thin- film resonator as claimed in    claim 8   , wherein one of the main axis and the sub axis is substantially parallel to a current direction.   
     
     
       11. The piezoelectric thin- film resonator as claimed in    claim 8   , wherein the upper electrode and the lower electrode are substantially symmetric about an axis of the elliptical shape perpendicular to a current direction within a range equal to half the length of the sub axis in the current direction.   
     
     
       12. A piezoelectric thin- film resonator comprising: a substrate; a lower electrode arranged on the substrate; a piezoelectric film arranged on the lower electrode; and an upper electrode arranged on the piezoelectric film, a cavity located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film, a membrane that includes the upper electrode and the lower electrode being formed above the cavity and being curved outwards, the membrane having a maximum height that is measured from a surface of the substrate and is at least  1 . 5  times the thickness of the membrane.   
     
     
       13. A filter comprising a plurality of piezoelectric thin- film resonators, at least one of the thin - film resonators comprising: a substrate; a lower electrode arranged on the substrate; a piezoelectric film arranged on the lower electrode; and an upper electrode arranged on the piezoelectric film, a cavity being located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film, the region and a cross - section of the cavity having an elliptical shape,  1 <a/b< 1 . 9  being satisfied where a is a main axis of the elliptical shape and b is a sub axis thereof.   
     
     
       14. A filter comprising a plurality of piezoelectric thin- film resonators, at least one of the thin - film resonators comprising: a substrate; a lower electrode arranged on the substrate; a piezoelectric film arranged on the lower electrode; and an upper electrode arranged on the piezoelectric film, a cavity located below the lower electrode in a region in which the upper electrode overlaps with the lower electrode through the piezoelectric film, a membrane that includes the upper electrode and the lower electrode being formed above the cavity and is curved outwards, the membrane having a maximum height that is measured from a surface of the substrate and is at least  1 . 5  times the thickness of the membrane.