Laser decapsulation method

Abstract

A decapsulation apparatus 100 has a laser 8 that removes plastic encapsulant from a device 24. Chamber 20 is sealed. Exhaust port 9 removes debris and fumes. The device 24 is positioned and scanned using an X, Y table 2. A hinged end 4 rotates the device to an acute angle of incidence with respect to a laser 8. Endpoint detector 10 senses the exposed integrated circuit and moves or shuts down the laser 8.

What is claimed is:  
     
       1. A method of manufacturing integrated circuits, the method comprising;
 forming encapsulated integrated circuits; and  
 sampling select integrated circuits to verify if the finished integrated circuits are made to manufacturing specifications by selectively removing portions of the encapsulation with a laser that is suitable for breaking cross linked bonds of the encapsulant without damaging the integrated circuits, wherein a thin layer of encapsulant is left on at least one portion of at least one of the sampled integrated circuits.  
 
     
     
       2. The method of  claim 1 , wherein selectively removing portions of the encapsulant of the select sampled integrated circuits further comprises:
 monitoring amplitude and frequency of the laser light reflected of each selected integrated circuit; and  
 when a change in at least one of the amplitude and frequency is detected, moving each selected integrated circuit.  
 
     
     
       3. The method of  claim 2 , wherein moving each selected integrated circuit further comprises:
 advancing a stage upon which the select integrated circuit is mounted on.  
 
     
     
       4. The method of  claim 1 , wherein selectively removing portions of the encapsulant of the select sampled integrated circuits with a laser further comprises:
 using a laser with wavelengths in the infrared range that includes at least one range of 725-900 cm-1, 1150-1300 cm-1, 1400-1500 cm-1 and 1600-1750 cm-1.  
 
     
     
       5. The method of  claim 1 , wherein selectively removing portions of the encapsulation of the select sampled integrated circuits with a laser further comprises:
 using at least one of a YAG laser and an infrared laser.  
 
     
     
       6. The method of  claim 1 , wherein selectively removing portions of the encapsulation of the select sampled integrated circuits further comprises:
 changing an angle of incident of the laser by rotating a stage upon which the integrated circuits are mounted.  
 
     
     
       7. The method of  claim 1 , further comprising:
 testing the thin layer of encapsulant for contaminates.  
 
     
     
       8. The method of  claim 1 , wherein selectively removing portions of the encapsulation of the select sampled integrated circuits further comprises:
 removing debris caused by the removal of select portions of encapsulate by at least one of using a flow of gas to direct the debris away from the integrated circuits and capturing the debris in a dust bin.  
 
     
     
       9. A method of manufacturing integrated circuits, the method comprising:
 forming integrated circuits with a manufacturing process, wherein each integrated circuit is encapsulated to protect the integrated circuit from environmental factors;  
 selecting certain formed integrated circuits;  
 placing each selected integrated circuit on a stage in an enclosure;  
 directing a laser beam having a select wavelength on a select portion of the encapsulant to remove the select portion of encapsulant, wherein with at least one of the select integrated circuits the select removed portion of encapsulant has a depth, the depth being less than a thickness of the encapsulant;  
 monitoring the laser beam reflected off of the integrated circuit;  
 moving the stage based at least in part on the monitored reflected laser beam;  
 terminating the laser beam based at least in part on the monitored reflect laser beam; and  
 testing the selected integrated circuits with the select portion of encapsulant removed to verify that the integrated circuits are formed to manufacture specifications.  
 
     
     
       10. The method of  claim 9 , further comprising:
 exhausting debris from the enclosure.  
 
     
     
       11. The method of  claim 10 , wherein exhausting debris from the stage further comprises:
 directing a flow of gas to disperse the debris away from the integrated circuit.  
 
     
     
       12. The method of  claim 9 , further comprising:
 catching debris particles in a dust bin.  
 
     
     
       13. The method of  claim 9 , further comprising:
 testing for contaminates in a thin layer of encapsulant left on the at least one select integrated circuit having the select removed portion with a depth less than the depth of the encapsulant.  
 
     
     
       14. A manufacturing method of removing encapsulant from an integrated circuit; the method comprising:
 placing an integrated circuit on a stage in an enclosure;  
 directing a laser beam on the encapsulation of the integrated circuit, wherein the laser beam has a wavelength that is suitable for breaking cross linked bonds of the encapsulant without damaging the underlying integrated circuit;  
 removing at least one select portion of the encapsulant with the laser beam; and  
 capturing debris particles in a dust bin.  
 
     
     
       15. The method of  claim 14 , further comprising:
 monitoring the laser beam reflected off of the integrated circuit; and  
 based at least in part on the monitored laser beam, doing at least one of moving the stage and terminating the laser beam.  
 
     
     
       16. The method of  claim 14 , further comprising:
 after the removing the at least one select portion of the encapsulant, verifying the integrated circuit is made to manufacturing specifications.  
 
     
     
       17. The method of  claim 14 , further comprising:
 directing a flow of gas to move the debris away from the integrated circuit.  
 
     
     
       18. The method of  claim 14 , further comprising:
 leaving a thin layer of encapsulant at the at least one select portion, and  
 testing for contaminates in the thin layer of encapsulant.  
 
     
     
       19. A method of removing encapsulant from a encapsulated device, the method comprising:
   placing an encapsulated device on a stage in an enclosure;        directing a laser beam on the encapsulation of the encapsulated device;        removing at least one select portion of the encapsulant with the laser beam; and        leaving a thin layer of encapsulant on the encapsulated device at the at least one select portion.     
     
     
       20. The method of  claim 19 , and further including capturing debris particles in a dust bin. 
     
     
       21. The method of  claim 19 , and further including:
   rotating the stage until the encapsulated device is in a substantially vertical position in the enclosure.     
     
     
       22. The method of  claim 19 , and further comprising:
   testing for contaminants in the thin layer of encapsulant.     
     
     
       23. The method of  claim 19 , wherein directing a laser beam further comprises:
   directing a laser beam with wavelengths in the infrared range that includes at least one range of  725   -   900  cm -   1 ,  1150   -   1300  cm -   1 ,  1400   -   1500  cm -   1  and  1600   -   1750  cm -   1 .     
     
     
       24. The method of  claim 19 , wherein directing a laser beam further comprises:
   using at least one of a YAG laser and an infrared laser.     
     
     
       25. The method of  claim 19 , wherein removing at least one select portion of the encapsulant with the laser beam further comprises:
   changing an angle of incidence of the laser by rotating a stage upon which the encapsulated devices are mounted.     
     
     
       26. The method of  claim 19  wherein directing a laser beam comprises directing a laser beam with a wavelength that is suitable for breaking cross linked bonds of the encapsulant without damaging the underlying encapsulated device. 
     
     
       27. A method of manufacturing encapsulated devices, the method comprising:
   forming encapsulated devices with a manufacturing process, wherein each encapsulated device is encapsulated to protect the encapsulated device from environmental factors;        selecting certain formed encapsulated devices;        placing each selected encapsulated device on a stage in an enclosure;        directing a laser beam having a select wavelength on a select portion of the encapsulant to remove the select portion of encapsulant;        catching debris particles in a dust bin; and        testing the selected encapsulated devices with the select portion of encapsulant removed to verify that the encapsulated devices are formed to manufacture specifications.     
     
     
       28. The method of  claim 27 , and further comprising:
   monitoring the laser beam reflected off of the encapsulated device;        moving the stage based at least in part on the monitored reflected laser beam; and        terminating the impingement of the laser beam based at least in part on the monitored reflected laser beam.